| 摘要 |
The device improves the trapezoidal, magnification, and rotational error by the position control of X,Y,Z direction, and minimizes the error between exposure circuit pattern(7) and ideal circuit pattern(6). The device includes the X,Y direction drivers(8,9) which are driven by X,Y directional motors(18,19), the X,Y,Z direction drivers(10) which are driven by the piezo electronic device(23), the X,Y direction air bearings(12,15) placed in the X,Y direction drivers(8,9), and the reduces the error of magnification, trapezoidal, rotation error by position control.
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