METHOD AND DEVICE FOR IMPROVED UNIDIRECTIONAL AIRFLOW IN CLEANROOM

摘要

A ceiling structure within a cleanroom, including an array of cleanroom filters (31) supported in openings (23) of a grid support structure (33), wherein the ceiling structure includes a gel track (144) coupled either at the top of the grid support structure (33). The cleanroom filters (31) including a peripheral flange (148), are suspended in the ceiling structure by having a sealing edge of the peripheral flange (148) either immersed in the gel track (144) at the top of the grid support structure (33) or using a cleanroom filter (31) having gel or the lower knife edge seal thereof engaging a portion of the top of the grid support structure (33). Filtered air passes through the grid support structure (33) into the vortex region to reduce the vortex region or dead air space below the channel as well as prevent the accumulation of particulate material in the interior of the channel. A damper (290) may be provided with the grid support structure to control the flow of filtered air into the interior of the grid support structure (33).