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发明名称
VERFAHREN ZUR HERSTELLUNG VON DOTIERTEN HALBLEITERSCHICHTEN.
摘要
申请公布号
AT127959(T)
申请公布日期
1995.09.15
申请号
AT19900908470T
申请日期
1990.06.02
申请人
AIXTRON GMBH
发明人
JUERGENSEN, HOLGER
分类号
H01L21/205;H01L21/20;H01L21/203;H01L21/22;H01L21/225;(IPC1-7):H01L21/22
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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