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经营范围
发明名称
Lithographie im fernen UV-Gebiet.
摘要
申请公布号
DE3588012(T2)
申请公布日期
1995.09.14
申请号
DE19853588012T
申请日期
1985.06.12
申请人
AT & T CORP., NEW YORK, N.Y., US
发明人
BRUNING, JOHN HENRY, BROOKSIDE NEW JERSEY 07926, US
分类号
G03F7/20;G03F7/207;H01L21/027;H01L21/30;(IPC1-7):G03F7/20;G03B41/00
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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