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经营范围
发明名称
FORMATION OF CRYSTALLINE SILICON FILM
摘要
申请公布号
JPH07235498(A)
申请公布日期
1995.09.05
申请号
JP19940024592
申请日期
1994.02.23
申请人
NEC CORP
发明人
KODAMA NORIYUKI
分类号
H01L27/146;H01L21/20;H01L21/205;H01L21/268;(IPC1-7):H01L21/205
主分类号
H01L27/146
代理机构
代理人
主权项
地址
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