发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To obtain a semiconductor device wherein the connection of a high speed multipin LSI of narrow pitch is enabled, and signal delay and crosstalk noise are small, by forming a low dielectric constant layer on a wiring which layer is composed of material whose permitivity is lower than that of package material or that of package bonding material. CONSTITUTION:A package cap 10 having a recessed part for preventing the contact with bonding wires 12 is fixed on a package substrate 11. The package cap 10 is bonded to the package substrate 11 so as to sandwich a lead frame 15 via glass 14. A low dielectric constant layer 16 is formed on the peripheral surface of the lead frame 15. The low dielectric constant layer 16 formed on a wire 15 is composed of material whose dielectric constant is lower than that of the package material or that of the package bonding material.
申请公布号 JPH07202053(A) 申请公布日期 1995.08.04
申请号 JP19930349641 申请日期 1993.12.29
申请人 TOSHIBA CORP 发明人 YAMAKAWA KOJI;KOIWA KAORU;IYOGI YASUSHI;YASUMOTO YASUAKI;IWASE NOBUO
分类号 H01L23/02;H01L23/04;(IPC1-7):H01L23/02 主分类号 H01L23/02
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