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发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH07201742(A)
申请公布日期
1995.08.04
申请号
JP19930335723
申请日期
1993.12.28
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SUZUKI NAOKI;OKUMURA TOMOHIRO;HOUCHIN RIYUUZOU
分类号
H05H1/46;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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