| 摘要 |
PURPOSE:To provide a small laser beam machining device in which the intensity distribution of a machining beam for a work to be irradiated with is made like an Gaussian distribution and by which irradiation areas of different sizes can be irradiated with the machining beam. CONSTITUTION:The beam diameter of a later beam LB from a laser light source 1 is expanded/contracted through a beam expander consisting of a first lens 12 and a second lens 13, a laser beam emitted from the beam expander is converged on the opening of a variable aperture diaphragm 16 through a relay lens 15, the laser beam passed through the variable aperture diaphragm 16 is converted to a nearly parallel luminous flux by an objective lens 20, and a work 7 is irradiated with it. |
