发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To realize high density mounting, and facilitate mounting onto a board without exerting adverse influence upon a semiconductor chip, by two- dimensionally arranging I/O terminals on the whole surface of a semiconductor chip which terminals have been arranged in only the periperal part of a chip. CONSTITUTION:A first patterned wiring layer 4 is formed on a first insulating layer 3 and I/O terminals 2. Conductor posts 7 composed of Cu and Au are formed in a lattice type on the main surface of a semiconductor chip 1. As to the I/O terminals 2 and the conductor posts 7, a conductor post 7a is connected with, e.g. an I/O terminal 2a through a first wiring layer 4a, and a conductor post 7b is connected with an I/O terminal 2b through a first wiring layer 4b. Thereby, e.g. I/O terminal 2b which has no connection objects with the conductor posts 7 in the uppermost row can form the first wiring layer 4 between the conductor posts 7, so that the intervals of the conductor posts 7 can be reduced. Hence high density mounting is enabled.
申请公布号 JPH07183425(A) 申请公布日期 1995.07.21
申请号 JP19930327299 申请日期 1993.12.24
申请人 TOSHIBA CORP 发明人 HIRUTA YOICHI;ITO KENJI
分类号 H01L21/60;H01L21/321;H01L23/12;H01L23/34 主分类号 H01L21/60
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