| 摘要 |
PURPOSE:To obtain an ink jet device excellent in mass productivity and made easy in electrical connection by forming first and second electrodes on the jet channel side and non-jet region side of a partition wall and connecting the third electrodes formed to the bottom surface and opening of the groove of the non-jet region of the partition wall to the respective second electrodes. CONSTITUTION:A plurality of parallel grooves 19 having the same depth and gradually shallow toward one end surface 15 to become shallow grooves 7 are formed to a piezoelectric ceramics plate 2. The partition walls 6 of the side surfaces of the grooves 19 are polarized in the direction shown by an arrow 5. Next, the metal electrodes 8 formed to the upper halves of both inner side surfaces of the grooves 19 are electrically connected to the metal electrodes 9 formed to the side and bottom surfaces of the shallow grooves 7. Grooves 4 as non-jet regions are formed to the side surfaces opposite to the processing sides of the grooves 19 at positions shifted from the grooves 19 by a half pitch so as to become gradually shallow toward one end surface to become plane parts 16. Metal electrodes as second and third electrodes are formed to the entire inner and processing surfaces of the grooves 4 to be electrically connected 17. |
