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发明名称
AUTOMATIC FOCUSING DEVICE FOR SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPH07176285(A)
申请公布日期
1995.07.14
申请号
JP19930322396
申请日期
1993.12.21
申请人
HITACHI LTD
发明人
MAEDA TATSUYA
分类号
H01J37/22;H01J37/141;H01J37/21;(IPC1-7):H01J37/21
主分类号
H01J37/22
代理机构
代理人
主权项
地址
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