| 摘要 |
PURPOSE:To manufacture a polygon mirror which is required to be processed with high accuracy to submicron with high yield and high productivity by eliminating the flatteing processing of the processing reference surface thereof. CONSTITUTION:The polygon mirror is constituted by arranging six mirror surfaces 12 at equal positions on the side surface thereof and provided with the processing reference surface 14 for fixing the polygon mirror to a jig when the mirror surfaces 12 are processed on the front and the back surfaces. Besides, three grooves 15a-15c are provided between a processing reference area where the reference surface 14 is provided and the peripheral part thereof as a distortion buffer part buffering distortion. The circle diameters of the grooves 15a-15c are mutually different and they are alternately provided on the front and the back surfaces. |
