| 摘要 |
<p>PURPOSE:To obtain a liquid crystal display device at low cost having good durability and high reliability using a transparent insulating substrate such as glass substrate by resolving the problem of contamination of sodium from the inside of a transparent insulating substrate such as a glass substrate. CONSTITUTION:Impurity contamination by alkali metals such as sodium precipitated from the inside of a transparent insulating substrate such as glass substrate 1 is trapped in PSG film 2 as a gettering layer. Therefore, diffusion or impurity contamination into an active layer 4 formed on a buffer layer 3 is prevented. In this liquid crystal display device, extremely good flatness of a PSG film 2 (or BPSG film) is obtd. by heating such as annealing, and thereby, influences of surface roughness of the transparent insulating substrate can be suppressed.</p> |
