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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07161826(A)
申请公布日期
1995.06.23
申请号
JP19930339564
申请日期
1993.12.03
申请人
RICOH CO LTD
发明人
USAMI TARO
分类号
H01L21/28;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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