| 发明名称 |
METHOD FOR FABRICATING SELF-ASSEMBLING MICROSTRUCTURES |
| 摘要 |
<p>A method for assembling onto a substrate through fluid transport. The microstructures being shaped blocks (19) self-align into recessed regions (55) located on a substrate (50) such that the microstructure becomes integral with the substrate. The improved method includes a step of transferring the shaped blocks into a fluid to create a slurry. Such slurry is then ppoured evenly over the top surface (53) of a substrate having recessed regions thereon. The microstructure via the shape and fluid tumbles onto the surface of the substrate, self-aligns, and engages into a recessed region.</p> |
| 申请公布号 |
CA2177276(A1) |
申请公布日期 |
1995.06.22 |
| 申请号 |
CA19942177276 |
申请日期 |
1994.12.07 |
| 申请人 |
REGENTS OF THE UNIVERSITY OF CALIFORNIA (THE) |
发明人 |
SMITH, JOHN S.;YEH, HSI-JEN J. |
| 分类号 |
H01L21/302;B65G49/02;G02F1/136;G02F1/1362;G02F1/1368;H01L21/02;H01L21/306;H01L21/3065;H01L21/50;H01L21/52;H01L21/58;H01L21/677;H01L21/68;H01L21/78;H01L21/98;H01L23/13;H01L23/14;H01L25/04;H01L25/065;H01L25/075;H01L25/16;H01L27/12;H01L29/06;H01L29/88;H01L33/20;H01S5/022;H01S5/40;(IPC1-7):H01L21/70 |
主分类号 |
H01L21/302 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
