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经营范围
发明名称
Ionenimplantationsgerät und sein Steuerungsverfahren.
摘要
申请公布号
DE69017259(T2)
申请公布日期
1995.06.22
申请号
DE19906017259T
申请日期
1990.05.11
申请人
NISSIN ELECTRIC CO., LTD., KYOTO, JP
发明人
NOGAMI, MAMORU, UKYO-KU, KYOTO-SHI, KYOTO, JP;NAGAI, NOBUO, UKYO-KU, KYOTO-SHI, KYOTO, JP
分类号
H01J37/317;H01L21/677;H01L21/68;(IPC1-7):H01J37/317;H01L21/00
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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