发明名称 GAS COOLER
摘要 <p>PURPOSE:To avoid the corrosion due to the water content, chlorine gas etc., in a process exhaust gas by a method wherein a gas cooler main body having the whole element structured of quartz is provided with a flow path for cooling down itself while barriers are fixed to a barrier support further fixed to the inner surface of the main body. CONSTITUTION:Within the gas cooler main body 1 having a water flow path 2, barriers 3 are fixed zigzag to a barrier support 3a furthermore the barrier 3 on both end parts near a gas leading-in port 4 and a gas exhaust port 5 are fixed to the gas cooler main body 1. At this time, the gas cooler main body 1, the water path 2, the barriers 3 and the barrier support 3a are entirely structured of quartz. A gas led-in from the gas leading-in port 4 passing through the path shown by arrow is cooled down to be exhausted from the gas exhaust port 5. Accordingly, an oxidative gas once warmed up and then cooled down in this gas cooler main body made of a non-corrosive material such as quartz, etc., may not be corroded thereby enabling to be processed in a cleaned up atmosphere.</p>
申请公布号 JPH07147255(A) 申请公布日期 1995.06.06
申请号 JP19930295435 申请日期 1993.11.25
申请人 KOKUSAI ELECTRIC CO LTD 发明人 YOSHIDA HISASHI;HOSAKA EIJI;IKEDA KAZUTO;KAIHATSU HIDEKI;YAMAMOTO TETSUO
分类号 B01D53/26;F28F9/013;F28F21/00;H01L21/22;H01L21/324;(IPC1-7):H01L21/22 主分类号 B01D53/26
代理机构 代理人
主权项
地址