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发明名称
DOSE MODULATION AND PIXEL DEFLECTION FOR RASTER SCAN LITHOGRAPHY.
摘要
申请公布号
EP0653103(A1)
申请公布日期
1995.05.17
申请号
EP19940917933
申请日期
1994.05.06
申请人
ETEC SYSTEMS, INC.
发明人
ABBOUD, FRANK, E.;MURAY, ANDREW, J.;BERGLUND, C., NEIL
分类号
H01J37/305;H01J37/302;H01J37/317;H01L21/027;(IPC1-7):H01J37/302
主分类号
H01J37/305
代理机构
代理人
主权项
地址
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