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发明名称
METHOD FOR SELECTIVELY ETCHING SILICON SURFACES
摘要
申请公布号
US3540955(A)
申请公布日期
1970.11.17
申请号
USD3540955
申请日期
1968.04.18
申请人
MOTOROLA INC.
发明人
TERRELL B. KOGER
分类号
H01L21/00;H01L21/308;(IPC1-7):H01L7/34
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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