发明名称 |
Semiconductor device lead inspection system |
摘要 |
An inspection system utilizes an image doubler design that includes a plurality of mirrors that effectively folds the object distance by reflecting the image along a folded path. Strobed illumination is used in conjunction with a shutterless camera. Increased image resolution results from an optional anamorphic lens with vertical magnification. The lens assembly includes concentric toroidal lens that are produced from a single piece of machineable optical material.
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申请公布号 |
US5414458(A) |
申请公布日期 |
1995.05.09 |
申请号 |
US19930043333 |
申请日期 |
1993.04.06 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
HARRIS, CHARLES K.;BORCHARD, JOSEPH F.;CLUNN, ROBERT H.;MAUNDER, JAMES R.;MARRABLE, WALTER E. |
分类号 |
G01B11/00;G02B3/06;G02B13/08;G02B27/14;H01L21/66;H01L23/50;H04N7/18;H05K13/08;(IPC1-7):H04N7/18 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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