| 摘要 |
PURPOSE:To obtain the base plate piercing method and device and the base plate subjected to piercing in which a micropore is machined inexpensively in a short time by suppressing the effect on photodiodes to the minimum on the center of the concentric circular arcuate photodiodes of the base plate. CONSTITUTION:In the piercing method where plural diodes formed on the base plate surface side are arranged in a concentric circular arcuate shape and the micropore is formed on the center of the circular arcuate photodiodes of the base plate 1 which detects diffracted light received on the surface side, a flame retarding film 30 covers the surface of the base plate 1. The rear of the base plate 1 is opposed to a laser beam, the center of the circular arcuate photodiodes is matched with an optical axis of laser beam to position the base plate 1, the base plate 1 is irradiated with the YAG laser beam of 0.01-0.15J per pulse with 10-100Hz pulse frequency and a hole having 24-100mum diameter is formed on the center of the circular arcuate photodiodes. |
