发明名称 Thin-film wiring layout for a non-planar thin-film structure.
摘要 A thin-film arrangement for a non-planar structure is described. The structure includes a substrate (14) and a plurality of thin-film layers stacked on top of each other above the substrate. The layers contain conductive patterns (27-30) and vias (19-26) that provide connections between the conductive pattern in one of the layers to the conductive pattern in another layer. Vias that provide a connection between the conductive pattern of one layer are offset and in contact with respect to each other and are positioned in a non-linear arrangement, preferably in the form of a helix or a multiple helix. <IMAGE>
申请公布号 EP0626727(A3) 申请公布日期 1995.04.19
申请号 EP19940480032 申请日期 1994.04.22
申请人 IBM 发明人 MCALLISTER MICHAEL FORD;MCDONALD JAMES ALEXANDER;PRASAD KESHAV;ROBBINS GORDON JAY;SWAMINATHAN MADHAVAN
分类号 H01L23/12;H01L21/768;H01L23/522;H01L23/538 主分类号 H01L23/12
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