| 摘要 |
PURPOSE:To provide an interatomic force microscope, and a method for fabrication thereof, comprising a sharply pointed probe needle having a spring constant for supporting the probe needle at the free end thereof. CONSTITUTION:The cantilever for interatomic force microscope comprises a base material 11 of single crystal silicon having sufficient mechanical strength, a cantilever beam 12 of silicon oxide bonded at one end to the base material 11, and a cone type probe needle 13 formed at the free end, wherein the cantilever is entirely covered with a conductive thin film. Protective plates 15 are also provided on the opposite sides of the cantilever 12 by machining the base material 11 in order to protect the cantilever 12 against mechanical damage. |
