发明名称 |
EQUIPMENT AND METHOD FOR WIRE BONDING |
摘要 |
PURPOSE:To provide an apparatus and a method for wire bonding wherein positional information such as coordinates which is preliminarily stored in a bonding equipment can be made effective use of as it is. CONSTITUTION:By comparing image information of at least one of a first or a second bonding point which is to be a bonded section and a wire extended between the first and the second bonding point with positional information wherein the image information is preliminarily taken in, inspection correction can be done automatically. |
申请公布号 |
JPH0737926(A) |
申请公布日期 |
1995.02.07 |
申请号 |
JP19930199234 |
申请日期 |
1993.07.16 |
申请人 |
KAIJO CORP |
发明人 |
NISHIMAKI KOUJI;KAMIHARASHI TAKASHI |
分类号 |
H01L21/60;H01L21/00;H01L21/607 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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