发明名称 EQUIPMENT AND METHOD FOR WIRE BONDING
摘要 PURPOSE:To provide an apparatus and a method for wire bonding wherein positional information such as coordinates which is preliminarily stored in a bonding equipment can be made effective use of as it is. CONSTITUTION:By comparing image information of at least one of a first or a second bonding point which is to be a bonded section and a wire extended between the first and the second bonding point with positional information wherein the image information is preliminarily taken in, inspection correction can be done automatically.
申请公布号 JPH0737926(A) 申请公布日期 1995.02.07
申请号 JP19930199234 申请日期 1993.07.16
申请人 KAIJO CORP 发明人 NISHIMAKI KOUJI;KAMIHARASHI TAKASHI
分类号 H01L21/60;H01L21/00;H01L21/607 主分类号 H01L21/60
代理机构 代理人
主权项
地址