Coupling structure between optical semiconductor and optical waveguide, and coupling method of the same.

摘要

A structure and a method for coupling an optical semiconductor and an optical waveguide with high accuracy and productivity is disclosed. The semiconductor is mounted on a first substrate which is formed with a groove. A short optical fiber is received in the groove such that it is positioned at the same height as the light emitting portion of the semiconductor. The waveguide is formed on a second substrate while a groove is formed in the second substrate on the imaginary extension of the waveguide. The upper half of the short fiber is received in the groove of the second substrate, so that the fiber and waveguide are coupled to each other. To position the semiconductor relative to the first substrate, marks are provided on the mounting surface of the semiconductor and the surface of the first substrate and implemented by thin films which are opaque for infrared rays. The position of the semiconductor is adjusted by the steps of radiating infrared rays, calculating the areal centers of gravity of the marks, and moving the semiconductor until the areal centers of gravity align with each other. <IMAGE>