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发明名称
TEST SYSTEM FOR SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE INSERTION/REMOVAL STATION AND TEST CHAMBER
摘要
申请公布号
JPH0720199(A)
申请公布日期
1995.01.24
申请号
JP19930164585
申请日期
1993.07.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
SAKAI IWAO
分类号
G01R31/26;G01R1/067;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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