Cathode-sputtering apparatus comprising a device for measuring critical target consumption

摘要

A cathode-sputtering apparatus for the surface-coating of objects has a vacuum chamber which contains a helium-group gas, in which chamber a target cathode and an anode are arranged. A voltage for producing plasma discharges is applied to these electrodes and a magnetic field is applied, which intensifies the plasma discharges and concentrates them at the location of the target cathode. For measuring a critical target-consumption condition, at least one probe is provided in the target cathode, which probe is actuated when the target material is eroded up to the probe.