ACTIVE MATRIX TYPE LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress the occurrence of Al hillock and to reduce connection resistance so as to improve the reliability of the connecting section without complicating the structures of the wiring of scanning and signal lines formed on an active matrix substrate. SOLUTION: The active matrix type liquid crystal display device includes an active matrix substrate 1 having a transparent insulated substrate 10 on which a thin film transistor 14 and a pixel section 13 are formed. A gate electrode 15 of the transistor 14 and a scanning line 11 connected to the electrode 15 have a TiN/Ti/Al structure or a TiN/Al/Ti structure or a TiN/Ti/Al/Ti structure. Since a Ti film exists in contact with an Al film, the generation of Al hillock at the Al film is suppressed. Having the TiN layer at a top layer, surface corrosion at a scanning line terminal section 22 is suppressed, the increase in the connecting resistance at the section 22 is suppressed and the reliability is increased.