ION IMPLANTATION METHOD,申请号JP19930134314-传众专利搜索

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发明名称	ION IMPLANTATION METHOD
摘要
申请公布号	JPH06349765(A)	申请公布日期	1994.12.22
申请号	JP19930134314	申请日期	1993.06.04
申请人	HITACHI LTD	发明人	TANAKA TOSHIHIKO
分类号	H01L21/265;H01L21/027;(IPC1-7):H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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