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发明名称
摘要
申请公布号
JPH0650543(Y2)
申请公布日期
1994.12.21
申请号
JP19860131798U
申请日期
1986.08.27
申请人
发明人
分类号
H01L21/302;C23C14/35;C23C14/36;C23F4/00;H01F38/14;H01L21/205;H01L21/3065;H01L21/31;H01L23/00;(IPC1-7):C23F4/00
主分类号
H01L21/302
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代理人
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地址
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