发明名称 Single crystal pulling apparatus
摘要 A single crystal pulling apparatus based on Czochralski technique having a conduit for continuously supplying granular polycrystal material to the crucible and a vertical purge tube suspended centrally into the heating chamber, wherein the purge tube is vertically shiftable; a heat shield ring is connected to the lower end of the purge tube, and a cylindrical quartz partition ring made of a quartz glass containing no bubbles is held vertically by the heat shield ring in a manner such that the lower end of the quartz partition ring comes substantially lower than the lower end of the purge tube so that, by being dipped in the polycrystal melt, the partition ring isolates the interior surface of the melt from the exterior surface of the melt, over which latter the granular polycrystal material is poured.
申请公布号 US5373805(A) 申请公布日期 1994.12.20
申请号 US19920961764 申请日期 1992.10.15
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 TAKANO, KIYOTAKA;FUSEGAWA, IZUMI;YAMAGISHI, HIROTOSHI
分类号 C30B15/00;C30B15/14;(IPC1-7):C30B15/20 主分类号 C30B15/00
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