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发明名称
CHEMICAL VAPOR GROWTH METHOD
摘要
申请公布号
JPH06338497(A)
申请公布日期
1994.12.06
申请号
JP19930126943
申请日期
1993.05.28
申请人
NEC CORP
发明人
ISHIKAWA HIROSHI
分类号
H01L21/31;H01L21/318;H01L21/768;(IPC1-7):H01L21/318;H01L21/90
主分类号
H01L21/31
代理机构
代理人
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地址
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