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经营范围
发明名称
HEAT TREATMENT EQUIPMENT
摘要
申请公布号
JPH06333837(A)
申请公布日期
1994.12.02
申请号
JP19930139467
申请日期
1993.05.18
申请人
TOKYO ELECTRON LTD
发明人
TANAKA KIYOSHI;YONENAGA TOMIHIRO;RI HIDEKI
分类号
H01L21/203;C23C16/458;H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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