CLEANING AGENT, CLEANING METHOD AND CLEANING APPARATUS

摘要

A cleaning agent according to the invention contains a cleaning ingredient having a difference of 3 or less in solubility parameter relative to at least one ingredient which constitutes dirt or having a difference of 3 or less in solubility parameter relative to at least one ingredient which constitutes dirt and angle of contact of 15 degrees or less in cleaning an article being cleaned and having at least partially gap portions. The cleaning agent can provide good cleaning since it easily penetrates and solves a cutting oil existent in gaps between metallic strips and the like. Furthermore, a cleaning method according to the invention can make a cleaning quality and a drying quality compatible with each other in finely cleaning electronic parts since the parts are first cleaned with a polar cleaning agent and then are rinsed with a less polar or nonpolar cleaning agent for drying. In addition, in either of the cleaning agent and the cleaning method according to the invention, any cleaning agent such as CFC based solvents and chlorine based solvents is not used which causes environmental destruction and environmental pollution, so that safety for environment is obtained.