METHOD AND APPARATUS FOR REACTIVE ION ETCHING,申请号JP19930125495-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR REACTIVE ION ETCHING
摘要
申请公布号	JPH06314673(A)	申请公布日期	1994.11.08
申请号	JP19930125495	申请日期	1993.04.28
申请人	NIPPON STEEL CORP	发明人	TAKANO KAZUO
分类号	H01L21/302;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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