发明名称 VISCOUS DAMPER DEVICE
摘要 PURPOSE:To provide a viscous damper device which gives no static or semi- static deformation to a structure by sealing a container with viscosity fluid with no bubbles. CONSTITUTION:This viscous damper device 1 is subjected to bubble venting, where no bubbles exist in viscous fluid 4. A no-contact type displacement meter measures the displacement of a gate stage 5 near a damper mounting position. With no damper attached (A), it reaches Z which is a target value, however, it is vibrational. In the case of a conventional viscosity damper device (B), attenuation is restrained, however, a static or semi-static deformation DELTAZ exists by a restoring force. In the case of this viscosity damper device (C), no static or semi-static deformation DELTAZ exists. Attenuation restraint is also realized.
申请公布号 JPH06307482(A) 申请公布日期 1994.11.01
申请号 JP19930094410 申请日期 1993.04.21
申请人 CANON INC 发明人 TSUI KOTARO
分类号 F16F9/30;H01L21/027;H01L21/30;(IPC1-7):F16F9/30 主分类号 F16F9/30
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