EXCIMER LASER BEAM PROCESSING METHOD, EXCIMER LASER BEAM MACHINE FOR EXECUTING THIS PROCESSING METHOD, NOZZLE SHEET FORMED BY THIS PROCESSING MACHINE AND INK JET RECORDING HEAD HAVING THIS NOZZLE SHEET

摘要

PURPOSE:To surely prevent the deposition of microsplinters on a processing surface by holding a work within a processing atmosphere subjected to a pressure reduction and irradiating the work with an excimer laser beam within this atmosphere. CONSTITUTION:The processing surface of the work 11 is irradiated with the excimer laser beam generated by an excimer laser oscillator 22 and the work 11 is formed to a prescribed shape by using the excimer laser beam machine 10. The work 11 is, thereupon, housed in a vacuum vessel 12. The work 11 is held in the processing atmosphere in the vacuum vessel 12 in which the pressure is reduced down to a prescribed pressure. The work 11 is then irradiated with the excimer laser beam in the processing atmosphere. The processing atmosphere is maintained under <=1X10<-1>Torr. The processing atmosphere consists of gas contg <=10atm.% oxygen. As a result, the flying distance of the microsplinters is extended.