| 摘要 |
An optical apparatus, which may be used as an ellipsometer, or as an apparatus to measure the refractive index of a sample, comprises a unit (10) for emitting a beam (B1) of polarised light onto a sample (12), the unit (10) being rotatable to rotate the plane of polarisation of the incident beam (B1), and a photodetector (14) for receiving the beam (B2) reflected from the sample. Preferably the angle of incidence of the beam on the sample can be altered. |
