| 摘要 |
In a case for holding and carrying a substrate such as a photomask, a case body comprises a top cover and a bottom cover, whose inner surfaces include inwardly extending protrusions integrally formed therewith. The protrusions are crowned with silicone caps to hold a substrate. The substrate within the case is at its four corners fixedly held from both sides by the silicone caps. The top and bottom covers also include at their inner surfaces a plurality of positioning projections designed to come into contact with the edges of the substrate to place the substrate in position in its surface direction. Then the top cover and the bottom cover are brought into engagement with each other and fastened together, thereby providing a case low in dust generating characteristics arising from vibration and capable of holding various sizes and thicknesses of the substrate. |
