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经营范围
发明名称
ETCHING OF COMPOUND CRYSTAL
摘要
申请公布号
JPH06267930(A)
申请公布日期
1994.09.22
申请号
JP19920153131
申请日期
1992.06.12
申请人
NEC KANSAI LTD
发明人
KOBAYASHI AKIRO
分类号
H01L21/308;H01S5/00;(IPC1-7):H01L21/308;H01S3/18
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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