| 摘要 |
PURPOSE:To perform sealing while carrying a product at constant speed by means of a carrier independent of the shape of a process tube, in the condition that a semiconductor device is kept in the process tube. CONSTITUTION:This machine has an upper belt 1, a lower belt 2, a horizontal belt 3, and a controller 4. The change of the height and the width of a process tube 5 is performed in such a way that the upper, lower, and horizontal belts 1, 2, and 3 shift automatically to the position geared to the size of the process tube 5 merely by designating a product, by inputting data on the name of the product, the height of the tube, the width, etc., into the controller 4 in advance. Therefore, it can cope with all process tubes. |
