| 摘要 |
PURPOSE:To provide a minute feed device in which parallelism is not so required, and an object can be moved precisely and minutely even in case of existence of error of parallelism between the object to be minutely moved such as a stage and a movement axis. CONSTITUTION:A piezoelectric element 16 for clamping as a first actuator, a piezoelectric element 18 for clamping as a second actuator, and a piezoelectric element 40 for movement as a third actuator are drivingly controlled by means of a driving control device 65, and a clamp block 12 as a first supporting member and a clamp block 14 as a second supporting member are minutely fed together with the moving plate 52 of a table device 50 as the object at a prescibed timing, following to a plate spring 28 as a guide means. |
