发明名称 PRODUCTION OF SINGLE CRYSTAL THIN FILM
摘要 PURPOSE:To obtain a single crystal thin film at a low cost by enabling a substrate material therefor to be selected regardless of the material of the aimed single crystal thin film. CONSTITUTION:Firstly, a single crystal thin sheet 2 is stuck as seed crystal to a thin film substrate 1. The aimed single crystal thin film 4 is successively and continuously grown on the substrate 1 beginning with the single crystal thin sheet 2.
申请公布号 JPH06227892(A) 申请公布日期 1994.08.16
申请号 JP19930016457 申请日期 1993.02.03
申请人 MURATA MFG CO LTD 发明人 FUJII TAKASHI;TAKAGI HIROSHI
分类号 C30B23/08;C30B25/02;C30B29/42;H01L33/30;H01S5/00 主分类号 C30B23/08
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