发明名称 |
PRODUCTION OF SINGLE CRYSTAL THIN FILM |
摘要 |
PURPOSE:To obtain a single crystal thin film at a low cost by enabling a substrate material therefor to be selected regardless of the material of the aimed single crystal thin film. CONSTITUTION:Firstly, a single crystal thin sheet 2 is stuck as seed crystal to a thin film substrate 1. The aimed single crystal thin film 4 is successively and continuously grown on the substrate 1 beginning with the single crystal thin sheet 2. |
申请公布号 |
JPH06227892(A) |
申请公布日期 |
1994.08.16 |
申请号 |
JP19930016457 |
申请日期 |
1993.02.03 |
申请人 |
MURATA MFG CO LTD |
发明人 |
FUJII TAKASHI;TAKAGI HIROSHI |
分类号 |
C30B23/08;C30B25/02;C30B29/42;H01L33/30;H01S5/00 |
主分类号 |
C30B23/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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