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发明名称
PROCESSING APPARATUS
摘要
申请公布号
JPH06224145(A)
申请公布日期
1994.08.12
申请号
JP19930008516
申请日期
1993.01.21
申请人
TOKYO ELECTRON TOHOKU LTD
发明人
IWAI HIROYUKI;KADOBE MASAHITO;FUKUSHIMA HIROKI
分类号
H01L21/677;H01L21/22;H01L21/68;(IPC1-7):H01L21/22
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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