LASER ETCHING METHOD AND DEVICE THEREFOR

摘要

PURPOSE: To enable an etching pattern to be formed more sharply and correctly in the laser etching of a circular template. CONSTITUTION: A lacquer layer formed on a hollow cylinder 8 is eroded within specified pattern regions by a laser beam 4. The erosion of the lacquer layer within the pattern regions occurs due to the continuous emission of the laser beam 4. In this case, the laser beam 4 is deenergized at the end of every pattern region within a time interval of 12 μs to 30 μs. Radiation returning to the laser beam path after being reflected back by a metal screen 8 is removed from the laser beam path. Thus the deenergization of the laser beam 4 occurs in a short time resulting in the generation of patterns with sharp edge structures.