PATTERN FLAW INSPECTING DEVICE

摘要

PURPOSE:To provide the pattern flaw inspecting method and a device used for its implementation capable of improving the detection sensitivity, allowing a high-speed inspection, capable of precisely making a flaw inspection in color, and capable of recognizing the necessary flaw information by a machine itself. CONSTITUTION:A test object formed with a pattern is inspected by an optical sensor 1 arranged with three CCD cameras 1R, 1G, 1B. The CCD cameras 1R, 1G, 1B are provided with R, G, B color filters 10R, 10G, 10B, and R, G, B output signals are outputted to a flaw judging computer 2. The flaw judging computer 2 compares the position outputs picked up by the CCD cameras 1R, 1G, 1B with the reference outputs at the corresponding positions of the reference output potential map of a comparison object to calculate differences, then compares them with the prescribed judgment functions, and judges the presence of a flaw in each color.