| 摘要 |
PURPOSE:To reduce the deformation due to the thermal expansion difference between a basic body and a soft member and facilitate working with high precision, by arranging a plurality of projecting stripe bodies each of which is made of soft material and has a top surface in contact with a workpiece, on the surface of the basic body of a surface plate. CONSTITUTION:On the surface 3 of a basic body 2 forming a surface plate 1 in the lapping work for polishing a workpiece, a plurality of projecting bodies 4 each of which is made of soft material and has a top surface 4a for the polishing in contact with the workpiece are arranged. Between the projecting stripe bodies 4, grooves 5 for supplying a polishing liquid and discharging the waste articles such as polishing dust outside are formed. Further, at the center part of the surface plate 1, a hole for the insertion of a rotary shaft is formed. Accordingly, the thickness of the surface plate 1 can be made thin, and the deformation due to the thermal expansion difference between the basic body 2 and the soft material forming the projecting stripe body 4 is reduced. Accordingly, the high polishing working precision can be obtained, obviating the necessity of temperature control. |
