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发明名称
PROJECTION EXPOSURE DEVICE
摘要
申请公布号
JPH06163349(A)
申请公布日期
1994.06.10
申请号
JP19920310000
申请日期
1992.11.19
申请人
NIKON CORP
发明人
UMAGOME NOBUTAKA
分类号
G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027;G03B27/32
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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