发明名称 REMOVAL METHOD OF RESIST FILM PICTURE IMAGE IN FABRICATION PROCESS OF LIQUID CRYSTAL DISPLAY
摘要 <p>PURPOSE:To provide a removal method of removing a picture image composed of a resist film disposed on a substrate but being unnecessary in a processing process of a transparent electrodes, semiconductor layers such as amorphous silicon, and insulating layers, etc., upon fabrication of liquid crystal display devices such as a thin film transistor type liquid crystal display device. CONSTITUTION:In a fabrication process of liquid crystal display devices, a curing type pressure sensitive bonding agent or a bonding sheet, etc., are sticked on the upper surface of a picture image composed of a resist film provided on a substrate, and after the bonding agent is cured, the bonding agent or the bonding sheet, etc., and a resist material are exfoliated integrally to hereby remove the resist film picture image on the substrate.</p>
申请公布号 JPH06163395(A) 申请公布日期 1994.06.10
申请号 JP19920314777 申请日期 1992.11.25
申请人 NITTO DENKO CORP 发明人 NAMIKAWA AKIRA;KIHARA YASUO
分类号 G02F1/136;G02F1/1368;G03F7/42;H01L21/027;H01L21/30;(IPC1-7):H01L21/027 主分类号 G02F1/136
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