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经营范围
发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH06145965(A)
申请公布日期
1994.05.27
申请号
JP19920305286
申请日期
1992.11.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
KOSHIRAKAWA NOBUTAKA
分类号
C23C14/26;C23C14/32;C30B23/02;H01L21/205;(IPC1-7):C23C14/26
主分类号
C23C14/26
代理机构
代理人
主权项
地址
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